I am working on a MEMS sensor application in which I would like to use a very
heavily boron doped silicon wafer, with a doping concentration of 1-10 x 10^19
cm-3. (as opposed to diffusing boron into a wafer, or growing a heavily boron
doped epitaxial layer).

Does anyone know if such wafers are available, and if so, what company might
sell them? Thanks very much in advance for any leads.

Sincerely,

Brian Cunningham
Draper Laboratory
[email protected]