A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Double-Thickness Wafers
Double-Thickness Wafers
2000-05-03
Robert Johnstone
Double-Thickness Wafers
Robert Johnstone
2000-05-03
Hello All,

I am hoping to do some bulk micromaching in silicon where the structures are up
to 450 micrometers deep.  Given that the standard wafer thickness is 475
micrometers, this is going to be a problem, especially since some of the
structures will be trenches that will run the entire length of the wafer.

Is anyone aware of a reasonably priced supply of double-thickness wafers?
Alternatively, has anyone had success with bonding two wafers together?

I would appreciate any input in this matter.

Robert Johnstone


reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
MEMS Technology Review
Mentor Graphics Corporation
MEMStaff Inc.
Harrick Plasma, Inc.