Dear Colleagues-
I have an application where I need an anisotropic etch through a 500
micron thick <100> wafer. I don't have Silicon Nitride capability, so I'd
like to use an SiO2 pattern mask. Since SiO2 won't stand up to that deep a
KOH etch, I'd like to try TMAH. Can anyone provide me with a source for TMAH
at a reasonable price? The only thing I've found so far is about $100.00 for
500ml.
Thanks,
Phil Klauder
Voice: 215-646-7400 ext. 2151
Fax: 215-646-3547
E-Mail: [email protected]