Dear all,

I experienced that the electric resistivity of Cr/Au bi-layer thin-film
resistor was drastically increased after a thermal treatment. The process
condition was: rough vacuum (~Torr), 380 degC, 2 hours. Cr/Au
(thickness=1k/3k angstroms) are on Pyrex substrate (sputtered on). The
resulted resistivity was ~20 times higher than un-treated samples.

Does any one know what happened to this? I appreciate if somebody can help
explain and maybe solve this problem.

Thanks and best regards,

Merry X'mas and Happy New Year!

Quanbo Zou
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Dr. Quanbo Zou
MEMS Department
Institute of Microelectronics
11 Science Park Road
Singapore Science Park II
Singapore 117685
Tel: 65-7705905(O) 65-2642113(H)
Fax: 65-7731915
Email: quanbo@ime.org.sg
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