Hi,

Does anyone know where to get low stress(less than
100MPa in tension) nonstoichiometric silicon nitride wafer?
Thickness of nitride would be about 0.5 to 1 micron.

Thank you for your help.

mori


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Kiyotaka Mori (Graduate Research Assistant)

Dept.of Materials and Nuclear Engineering,
BLDG.090,
University of Maryland at College Park,
College Park, MD 20742
Tel: 301-405-5229
Fax: 301-314-9467
E-mail: [email protected]
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