Dear MEMS,

Hello, I am Akiko Kubota from Michigan State University.
I have a question about anisotropic etch.
We have 100 orientation silicon wafer and would like to etch.   I know
the etching angle will be 54.7 degree.  However I am not sure if it'll
be the same angle even we etch the diagonal rectangular opening over the
silicon wafer.  Does the angle differ from etching straight opening?  I
suppose the angle is same.  But please let me know.
It'll be appriciated very much.  Thank you.

Sincerely yours,
Akiko Kubota