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MEMSnet Home: MEMS-Talk: SOI - is it possible to make a thick Si layer
SOI - is it possible to make a thick Si layer
2000-06-05
HONGSHENG ZHANG
SOI - is it possible to make a thick Si layer
HONGSHENG ZHANG
2000-06-05
Hello, we are looking for some Silicon-on-Insulator wafers and we need the
silicon layer to be around 20-30 microns thick. The material and thickness
of the insulator layer are not critical. I appreciate it if anyone can give
me any information on this, especially some sources that may manufacture and
sell this type of wafers. Thanks a lot.

H. Zhang


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