I am new to the MEMS arena and have need of some information on the fabrication
of bolometers. The devices will involve oxide thin film sensistive elements.
The thin films must be deposited at high temperatures, 600 to 700 deg C. I am
interested in membrane fabrication processes tried, sucessfully or
unsuccessfully, that require similar conditions. Any publications or firsthand
experience would be extremely welcome. Thanks for your time.

John Buan
[email protected]