Hi all,
I woud like to know the mechanism of wet-ethinng polyimide using alkaline
reagent, for example KOH liquor.
Somebody know?
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Yoshio Nasu
Engineer
Micro Device Department
Electro Device Laboratory
Fujikura Ltd.
1440,Mutuzaki, Sakura, Chiba, 285-8550 Japan
PHONE +81 43 484 3950
FAX +81 43 484 3985
E-MAIL [email protected]
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