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MEMSnet Home: MEMS-Talk: Small vacuum chamber
Small vacuum chamber
2000-06-16
Mario Gross
Small vacuum chamber
Mario Gross
2000-06-16
Hi *!

I'm looking for a small vacuum chamber, which can be placed under a
microscope. Inside the chamber I want to place a MEMS resonator
structure which will be evaluated under low pressure conditions. The
dimensions of the chambers should be something like 4"x8" with a height
of about 1". I also need electrical contacts inside to let the resonator
running. Does anybody have an idea, where I can buy such a vacuum
chamber?

Thanks in advance,
Mario

--
Mario Gross
Robert Bosch Corporation
Research and Technology Center North America
4009 Miranda Avenue
Palo Alto, CA 94304
Phone   (650) 320-2936
Fax     (650) 320-2999
EMail   [email protected]


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