Dear MEMS collegues,
I am looking for suppliers of suitable equipment for supercritical
drying of 6" wafers.
Any informations about suppliers would be helpful.

Thank you for your help.

H.J. Quenzer
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H.J. Quenzer
Fraunhofer Institut für Siliziumtechnologie
Fraunhoferstr. 1
D-25524 Itzhoe
Tel: +49 4821 17 4524
Fax: +49 4821 17 4590
e-mail: [email protected]
Internet: http://www.isit.fhg.de
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