The following sources and references cited should be useful:
    1. Sorab K. Ghandhi, "VLSI Fabrication Principles - Silicon and Gallium
    Arsenide," John Wiley and Sons, NY, 1983, pp. 488-490. (I believe their is
    also a second edition of this text).

    2. S.M. Sze (editor), "Semiconductor Sensors," John Wiley and Sons, NY,
    1994, pp. 42-50.

    3. W.R. Runyan and K.E. Bean, "Semiconductor Integrated Circuit Processing
    Technology," Addison-Wesley Publishing Company, Reading, MA, 1990, pp.
    252-258 (especially Table 6.1 on p. 257).

Best regards,

Ed Kolesar
W.A. Moncrief Professor of Engineering
Texas Christian University
Department of Engineering
Fort Worth, TX 76129
Telephone: (817) 921-7677 or -7126
Telefax: (817) 921-7136 or -7704