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MEMSnet Home: MEMS-Talk: Regarding LIGA wafer.
Regarding LIGA wafer.
2000-06-28
ravi vongole
Regarding LIGA wafer.
ravi vongole
2000-06-28
HiEveryone,
I am a graduate student at University of Utah, i wanted to know what
materials other than PMMA are used as resist material. it will be of great
help if you can mail me the information, we are comparing thermal stresses
with different wafer combinations.

regards
Ravi Vongole,
MEB University Of Utah,
Salt lake city,
Utah.
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