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MEMSnet Home: MEMS-Talk: Re: absorption spectrum of photoresist
Re: absorption spectrum of photoresist
1999-12-08
S Garcia Blanco
Re: absorption spectrum of photoresist
S Garcia Blanco
1999-12-08
Hi Yahong,

In the paper K.Y.Lee et al., "Micromachining applications of a high
resolution ultrathick photoresist", J.Vac. Sci. Technol., B13(6), 1995,
pp3012-3015, there is an absorption graphic for SU-8. Hope it will be
useful for you!

Sonia.

On Sun, 28 Nov 1999, Yahong Yao wrote:

> Hello All,
>
> I want to find out the absorption spectrum of photoresist AZ5200, AZ4620,
> Shipley 1400, Shipley1800, and SU-8. Can anyone suggest me some web sites or
> books? Thanks in advance.
>
> Regards.   Yh
>
> -----------------------
> Yahong Yao
> L245, CESTM
> 251 Fuller road
> Albany, NY 12203
> Tel: (518)437-8728(o)
> Email:hhelen@hotmail.com
>
> ______________________________________________________
> Get Your Private, Free Email at http://www.hotmail.com
>
>


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