Dear Peter,
The problems are probably due to internal reflections in the glass. You
can try an Anti reflecting coating - either evap / sputter some metal on
the glass or you can purchase spin on ARC from Brewer Science.

Shay Kaplan

Peter Ting wrote:

> I had some troubles in doing photolithography on glass
> slides, especially when the pattern size is around two
> microns. Most patterns were deformed. However, when
> silicon wafers instead of glass slides were used as
> substrates, everyghing looks fine. Who can tell me why
> and how to solve this kind of problem.
> Thanks a lot!
> Mark
> Dept. of Chemistry
> Univ. of Washington
>
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