Hello,

I will try to deposit low temperature oxide at 400C on sputtered
Ni film. Does anyone know whether Ni film can survive the 400C
temperature? I have experiences on depositing LTO on Pt and Cr and
both metal were fine, but I found that Ti film used to agglomerate at
about 300C.

Thanks,

Li
**************************************************
Li Shi

Mechanical Engineering Department
University of California
Berkeley, CA 94720
E-mail: lishi@newton.berkeley.edu
Phone:  (510)643-3007
Fax:    (510)642-6163