For a test I'm looking for some 150 mm <110> wafers. Anyone who can help me?

Henne van Heeren
OnStream B.V.
Lodewijkstraat 1
5652 AC Eindhoven
The Netherlands
tel +31 40 295 9815
fax +31 40 295 9906
[email protected]

The Micromachining foundry

-----Original Message-----
From: Wajda Cory [mailto:[email protected]]
Sent: Thursday, November 04, 1999 12:44 AM
To: [email protected]
Subject: RE: 4620 resist


Patrick,

Based on our experience and on the advice of the resist manufacturer (AZ
P4620), the preferred method to softbake multiple layers of resist is to
reduce the time of the bake for the first layer(s). This helps to avoid over
baking the first layers of resist. Also, for each layer of resist, it is
best to ramp up the bake temperature in a few steps. This is easily done on
a hotplate with programmable proximity pins, but can also be done by using
several hotplates at different temperatures.

Cory

Cory Wajda
Electronic Visions, Inc.
e-mail  [email protected] 
web     http://www.elvisions.com 
Ph.     602 437 9492


                -----Original Message-----
                From:   [email protected] [mailto:[email protected]]
                Sent:   Monday, October 25, 1999 9:04 PM
                To:     [email protected]
                Subject:        4620 resist

                Dear Colleagues,
                in the use of multiple layers of 4620 and 4903 resists, is
there a
                preferred method of  softbake? We are talking of total of 30
microns thick
                built up in 5 layers. I have both vacuum oven bake and
hotplate available.

                Yours sincerely,

                Patrick Leech,
                CSIRO CMST,
                Private Bag 33, Clayton South MDC,
                Victoria , Australia.