Hello MEMS,

I am looking for some polymer (it can be
positive/negative photoresist or just a polymer) with the following
properties:

1) It should be possible to convert this polymer to red absorbing by
adding some dye.
2) It could be spincoated on glass. The final width
should be less than 1 micron.
3) It could be chemically polished to some smaller width with high
accuracy.

I'll be very glad for advice or reference concerning any of the three
statements above.

Alex
[email protected]
Electro-Optics Div.
Soreq NRC
Yavne Israel 81800
Fax: 972-8-9434823
e-mail: [email protected]