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MEMSnet Home: MEMS-Talk: who did use FORTURN glass
who did use FORTURN glass
2000-08-14
bruce
who did use FORTURN glass
bruce
2000-08-14
Dear Sir,
   I would like to ask  about using Forturn glass. If someone has done it,
please reply me which one
process should I improve?
   My process sequence using quartz mask is as follows:
     (1) UV Exposure
     UV wavelength: 312nm
     Intensity: 2.7mW/cm2
     Exposure time: 12 mins
     (2) Heat Treatment
     20¢J ~ 500¢J for 1 hour, temperature ramping up at 40¢J/min
  500¢J ~ 600¢J for 1 hour, temperature ramping up at 28¢J/min
 The results are that all of the exposed and unexposed areas turned into
burnt yellow
 and no pattern appeared.
 Could you please tell me what kind of ceramic material I should choose for
heat treatment,
 and whether the temperature ramp is too high and the light source is
appropriate?
 I would appreciate your early reply.
         Yours sincerely,
         Chonglong Chang


reply
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