Hello,

I have an adhesion problem between Su-8 (development finished) and metal
layers. Actually, I'd like to make metal thin film structures on top of Su-8
using a lift off process. However, while removing PR ultrasonically in
acetone right after sputtering metal layers on top of Su-8, I found that not
only PR but also the metal layers came off. Does anyone know how to make
metal layers stick to the Su-8? Cr/Au is used as metal layer and the Su-8 is
completely processed (pre-baking, exposure, PEB, development).

Thanks in advance.

Best,
Sungdong Kim
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Sungdong Kim
ISTG, MESA+ Research Institute
University of Twente
P.O.Box 217
7500 AE Enschede
The Netherlands
Phone: +31-53-4892747
Fax: +31-53-4893343
E-mail: s.d.kim@el.utwente.nl 
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