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MEMSnet Home: MEMS-Talk: CTE for Polysilicon in MUMPs
CTE for Polysilicon in MUMPs
2000-08-22
Frederick Chen
CTE for Polysilicon in MUMPs
Frederick Chen
2000-08-22
Hi,
        Does anyone know what the coefficient of thermal expansion for
polysilicon in MUMPs process or any others in general?  Thanks.

Fred Chen


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