Good morning,

My name is Satish Prabhakaran and I am a research assistant from Thayer School
of Engineering, Dartmouth College,New Hampshire.

I am trying to polish 3 inch wafers plated with copper. The copper which has to
be polished is 80 microns thick. I do not have a machine specifically for
polishing wafers but have access to regular polishing machines.. I am trying to
find something that will hold my wafer perfectly flat  while polishing on an
abrasive machine. The resolution in microns is critical. I would be grateful if
you could help me with my problem. I would also be grateful if you could also
tell me if there are any specific slurries that I should be using for my
polishing.

Thanking  you in anticipation
Satish Prabhakaran
Thayer School of Engineering
Dartmouth College
Hanover NH - 03755
USA