Hello,
I am interested to know if there is an upper limit for deposition of BPSG in
Lpcvd furnace,
I am especially interested to know if a long (up to 60,000 A) process
requires special care
from the point of view of water absorption inside the grown layer.

Thank you for any help.
Sincerely
Rony Sagi
Lambda Crossing Ltd.
E-mail rony@lambdax.com