Hello,

You can ask ALCATEL Vacuum Technology
http://www.alcatel.com/cable/hvt/
They have special expertise in leak testing and in semiconductor market.

Best regards.

gene_gan@am.exch.agilent.com wrote:

> Hi, there,
>
>         I am looking for a method to test the leakaging rate of the hermetic
> sealed micro-sensors. The device has a dimension of 1mm x .8mm x 0.5mm with
> cavity about 0.1 mm^3. My questions are:
>  1.  Is it possible to use He test to check the leakage rate and how to do
> it?
>  2. Are there any companies to provide this kind of service?
>
> Your suggestion is higly appreciated!
>
> Duke
>

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Olivier de Gabrielli - Responsable secteur Mécatronique
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