Dear colleagues
we are looking for suppliers of Plasma CVD equipment for small charges
(maybe 10 pieces) of 6" wafers. We know Oxford (it's to small) and
Novellus (to big for us).
Are there any known suppliers? It could be a cluster tool too.

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Regards
Andreas Albrecht

CiS Institut fuer Mikrosensorik gGmbH
Bereich TZM-Transfer
In den Weiden 7
D-99099 Erfurt
Tel. +49-(0)361-42051-75        Fax +49-(0)361-42051-76