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MEMSnet Home: MEMS-Talk: Electrical Properties of Polysilicon
Electrical Properties of Polysilicon
2000-09-19
Julian Martin
Electrical Properties of Polysilicon
Julian Martin
2000-09-19
Hello MEMS world:

I'm searching for a table with the electrical properties of
polysilicon.  The quantity I'm most interested in is resistivity
as a function of frequency.

Thanks.

Julian Martin





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