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MEMSnet Home: MEMS-Talk: Re How do you make a mask file in autocad?
Re How do you make a mask file in autocad?
2000-01-12
Shile
Re How do you make a mask file in autocad?
Shile
2000-01-12
I have been designing photomasks with AutoCad for some time.  I believe you
can either use either wide polylines or closed polylines of zero width.  I
have never used wide polylines, as I don't feel comfortable with their
etherial quality - you can't snap to an edge.
I use closed zero-width polylines.

 You shouldn't have any problem if you keep a couple of simple rules in
mind:

1.  The regions must be bounded by single closed polylines.  If you need to
create a region with multiple boundries , you must create it from a
superposition of single bounded regions.  For example to create a donut (2
boundries) draw half the donut (1 boundry) then mirror to create the whole
as the sum of 2 halves.

2.  The mainstream semiconductor industry does not know the meaning of a
circle or arc - the masks consist only of line segments.  If you need a
circle use a polygon with a sufficiently large number of sides.

3.  The polylines usually can have a maximum of ~2000 line segments.  If you
need more, break the region down into smaller regions'

-----Original Message-----
From: Christi Guthrie 
To: [email protected] 
Date: Wednesday, January 12, 2000 11:12 AM
Subject: How do you make a mask file in autocad?


>This is a multi-part message in MIME format.
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>hello,
>
>i need to make a fairly simple mask, and i would like to use autocad =
>since i know it fairly well...
>
>i have found a good, fairly affordable (linkedit) dxf -> cif,gds =
>converter, but my question is this: do u draw a closed polyline (ie a =
>rectangle) or a pline w/ some nonzero width (ie 5 units =3D 5um). if i =
>draw rectangles, the resulting cif file is composed of polygon (P) =
>commands followed by vertices. if i draw wide lines, the resulting cif =
>file is composed of wire (W) commands.
>
>is one better than the other...or does it really matter? or do you do =
>something completely different.
>
>any tips appreciated,
>
>dan
>
>------=_NextPart_000_0006_01BF4271.885B84A0
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>
>
>
>
>http-equiv=3DContent-Type>
>
>
>
>
hello,
>
 
>
i need to make a fairly simple mask, and i would = >like to use=20 >autocad since i know it fairly well...
>
 
>
i have found a good, fairly affordable (linkedit) = >dxf ->=20 >cif,gds converter, but my question is this: do u draw a closed polyline >= >(ie a=20 >rectangle) or a pline w/ some nonzero width (ie 5 units =3D 5um). if i = >draw=20 >rectangles, the resulting cif file is composed of polygon (P) commands = >followed=20 >by vertices. if i draw wide lines, the resulting cif file is composed of >= >wire=20 >(W) commands.
>
 
>
is one better than the other...or does it really = >matter? or do=20 >you do something completely different.
>
 
>
any tips appreciated,
>
 
>
dan
> >------=_NextPart_000_0006_01BF4271.885B84A0-- > >
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