Hi, Folks,

I need make a multilayer structure. The layers are SiO2 (1.5 micron thick),
on top of that is Cr/Au ( 0.15 micron thick). Both layers have the same
pattern which is 1 micron structure with 1 micron space. How to transfer the
pattern? The key thing is how to pattern the metals with this fine features?

Thank you in advance.
Yahong
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