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MEMSnet Home: MEMS-Talk: Glass etch.
Glass etch.
2000-10-09
Jorge
Glass etch.
Jorge
2000-10-09
Hi all,
does anyone know how to mask a glass wafer (Corning 7740) against BHF
etch lasting for 8 hours?
Our normal positive photoresist would stand just for 3 hours or so.
Thanks for your help in advance.
Jorge Amírola
Dept. El. Eng.
UPC
Barcelona-Spain


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