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MEMSnet Home: MEMS-Talk: Producing thin film Alumina on various substrates
Producing thin film Alumina on various substrates
2000-01-13
Dunn, Steve
Producing thin film Alumina on various substrates
Dunn, Steve
2000-01-13
Hi there,

I was wondering if anyone has any success producing a thin film of alumina
(ca 300 nm) on SiO2 or SiNx. We are hoping to use a spin coating technique,
is this feasible any refs or recipes or suppliers?

Best regards

Steve Dunn




Dr S Dunn
Building 70, Nanotechnology,
Cranfield University,
Cranfield, MK43 0AL
UK


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