We are looking for a silicon etchant that can be used on wafers that have SU-8
structures on them.
Does anyone have experience they can share in this area.
Thanks

Chris Turner
Principal Research Engineer
Central Research Labs
Dawley Road
Hayes
Middlesex
UK
UB3 1HH
tel. +44 (0)181 848 6465
fax. +44 (0)181 848 6442
e:mail  cturner@crl.co.uk
web     www.crl.co.uk