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MEMSnet Home: MEMS-Talk: SiO2 selective etch
SiO2 selective etch
2000-10-18
B. Upul Heyshan Mendis
SiO2 selective etch
B. Upul Heyshan Mendis
2000-10-18
Dear MEMS Researchers,

I'm  looking for a selective etchant. I want to remove a
SiO2 overlayer
without etching Aluminium. Can someone help ?

Thanks

Heyshan Mendis


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