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MEMSnet Home: MEMS-Talk: Re: Deposit Al on Glass Fiber
Re: Deposit Al on Glass Fiber
1996-04-12
Albert K. Henning
1996-04-12
[email protected]
Re: Deposit Al on Glass Fiber
Albert K. Henning
1996-04-12
Ingrid Y. Xu wrote:
>
> Hi, folks,
>
> I am facing difficulty of depositing 1 micron thick Al on glass capillary of
> 80  micron diameter. In order to get good uniformity, I need to rotate it. I
> have hard time to calculate the deposition rate. I am using e-beam
evaporation.
> Do you think sputtering will be better? Rotation control is also a big
problem.
> Any idea of how to do this process is highly appreciated. Thanks a lot.
>
> Ingrid
> MAL Lab, UIC
>
Once upon a time, the Gravitational Probe B project at Stanford (physics) had
to figure this out: how to deposit a metal line on a quartz half-sphere. I
think Dr. Susan Felch (now at Varian), and Prof. Blas Cabrera, participated in
this effort.

Al
--
Albert K. Henning, Ph.D.     415/617-0854 (Office)
Program Manager              415/326-9217 (FAX)
Redwood Microsystems         [email protected]
1020 Hamilton Avenue         http://www.redwoodmicro.com
Menlo Park, CA  94025


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