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MEMSnet Home: MEMS-Talk: Vapor HF Dry Release
Vapor HF Dry Release
2000-11-07
Wang Zhe
Vapor HF Dry Release
Wang Zhe
2000-11-07
We are seeking a source who can help us release a MEMS device by using vapor
HF to etch away PSG sacrificial layers. Any information is highly
appreciated.


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