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MEMSnet Home: MEMS-Talk: Indentation of Aluminum oxide film
Indentation of Aluminum oxide film
2000-11-15
K.Subramanian
Indentation of Aluminum oxide film
K.Subramanian
2000-11-15
Discussion Group

Hi,

Can someone please tell me where I can find data on how much pressure a
silicon probe needs to apply on an aluminum oxide film to be able to
pierce through it?

Thanks,
K.Subramanian.


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