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MEMSnet Home: MEMS-Talk: Re: SOI Wafers -Reply
Re: SOI Wafers -Reply
1996-04-12
Stephen H. Jones
Re: SOI Wafers -Reply
Stephen H. Jones
1996-04-12
Hello,

Virginia Semiconductor Inc can offer you thin silicon bonded to thick silicon/
SiO2. Contact VSI at (540) 373-2900.

Stephen Jones

>>
>> Dear "Poor Aussie":
>>
>> Since you need SOI with a thick layer (15 micron) of
>> silicon film, you may only have the option of Bonded-
>> and-Etchback SOI (BESOI) which permits such thicker
>> layers.  The alternative is (oxygen-implanted) SIMOX
>> wafers that subsequently require epi-silicon grown
>> on a thin 200-nm silicon film.
>>
>> For BESOI, you might try contacting either SiBond
>> L.L.C. (Hopewell Junction, NY) or Shin-Etsu Handotai -
>> SEH (Isobe, Japan or Washington State, USA).
>>
>> ----R.W. Griffith
>>
>>
>>


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