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MEMSnet Home: MEMS-Talk: Metal electrodes onto thick SU-8 resist
Metal electrodes onto thick SU-8 resist
2000-10-23
Dekker, R. (Ronald JDSU)
2000-11-15
Swomitra Mohanty
Metal electrodes onto thick SU-8 resist
Swomitra Mohanty
2000-11-15
 I've sputtered Aluminum on to SU-8 with no adhesion problems.  I have not
tried any other metals yet. I'm planning to do some different metals such as
platinum.  I'll post those results when i get them.

Swomitra Mohanty

School of Electrical and Computer Engineering
Georgia Institute of Technology
MiRC-Joseph Pettit Bldg
791 Atlantic Dr
Atlanta, GA 30332

e-mail: s.k.mohanty@butter.toast.net


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