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MEMSnet Home: MEMS-Talk: Photoresist with high Young's modulus
Photoresist with high Young's modulus
2000-11-22
Philipp Schmid
Photoresist with high Young's modulus
Philipp Schmid
2000-11-22
Hello,

I need a photoresist with a comparatively high Young's modulus (>10 GPa)
and with good adhesion to gold layers. The attainable thickness should
be around 5um. Does anyone know whether such a material exists and if
so, what its material properties are ? Thanks in advance.

Best regards

Philipp Schmid
[email protected]


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