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MEMSnet Home: MEMS-Talk: re: pump lifetimes
re: pump lifetimes
2000-01-18
Marisa Ahmad
re: pump lifetimes
Marisa Ahmad
2000-01-18
I received this question from a co-worker.   Please respond directly to me.

thanks in advance,
Marisa Ahmad

--------------------

Small question.  We have a Leybold mechanical pump hooked to a Reactive Ion
Etcher. It is running 24 hrs/ day, and pumps actively on the chamber about
35 times per day. How often should a pump under these conditions be rebuilt?
The reason I am asking is the pump seems to be blowing seals and requires
rebuilding about once a year, the manufacturer says this is normal...is it?
If not, what should we do to improve the time between rebuilds?


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