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MEMSnet Home: MEMS-Talk: Silicon Nitride - electrical breakdown
Silicon Nitride - electrical breakdown
2000-12-01
Dinh Ton
Silicon Nitride - electrical breakdown
Dinh Ton
2000-12-01
Hi all,

I am looking for data/reference to the electrical breakdown for
micron (a few) film of silicon nitride.  Anyone has the number?

Thanks,

Dinh Ton
[email protected]


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