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MEMSnet Home: MEMS-Talk: A question about DMD
A question about DMD
2000-12-04
[email protected]
A question about DMD
[email protected]
2000-12-04
dear professor:
    I am a postgraduate student from Tsinghua Univ of China. An article about
DMD said that there are double metal layer which forms a beam. The beam becomes
curved from a bending moment caused by the variation in stress between the two
metal films. Because one metal has a compressive residual stress while the other
metal has a tensile residual stess.
  But the article don't tell us what the metal is. Probably some metal can fit
this,such as Au,Al,Cr,Ni,Ti. But we are not sure. Would you please give some
information about the material? Thank you.
                                           yours truly
                                            Suyan Liu
                                            2000.12.4


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