Hi,friends
I try to depsoit one layer metal on the top of SiO2 and pattern it as my
backside alignment mark. The metal mark should stand KOH 20%wt 80degree
etching for nearly five hours at the least. Which kind of metal can be used?
i try Cr.but the result is bad.After two and half hour KOH etching,it is
damaged.

Thanks
Dlee
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