I am in need of a processing service, and I have not been able to find
anyone who provides this service. It is "reactive ion beam sputtering
of Silicon Nitride". I need the silicon nitride deposited on an
unheated 100 mm diameter silicon substrate that has photoresist
patterned on it so I can do a nitride lift off process. Can anyone
help?
--
John R. Karpinsky --- Chief Physicist
MEMS Optical, LLC., 205 Import Circle, Huntsville, AL 35806
Tel: 256-859-1886 Fax: 256-859-5890 Email: [email protected]