oh excuse me,
it's 5 microns Si - 1 micron SiO2 - 525 microns Si !!



Zouhair Sbiaa wrote:

> Are your dimension in Microns or Nano? Please specify
>
> Zouhair
>
> --
> Dr. Zouhair Sbiaa
> Coventor, Inc. (formerly Microcosm Technologies, Inc.)
> 215 First Street, Suite 219
> Cambridge, MA 02142
> Tel: 617-225-0094 Ext. 253
> Fax: 627-621-7838
> Email: [email protected]
>
> Matthieu Guirardel wrote:
>
>
>> Dear MEMS community,
>>
>> I'd like to know if the upper layer of an SOI wafer (55m Si - 15m SiO2 -
>> 5255m Si) could be under compressive stress condition (induced by the
>> fabrication process).
>>
>> thanks
>> regards
>>