Hi,
   I know someone here at univ.of Penn got the low stress Silicon nitride
t Univ of California at Berkely. you can try to search with them

Good luck
JL

Dr. Jon R. Fox"  wrote:
MCNC no longer seems to provide low stress SixNix as it used to 12 months
ago,
as they spun off their MEMS branch, which was then acquired. Does anyone have
a source with very short lead time for low-stress Silicon Nitride (500nm)
coated Si wafers (4inch,400-500 um thick)? I need to do some Si etching, but
don't have the time presently to experiment with low-stress processes myself.
Thanks,
Jon Fox

--
    Dr. Jon R. Fox
    fox@researchsupport.com
    Principal Scientist
    Research Support Instruments - New Jersey Operations
    at Princeton University
    Applied Physics Group
    MAE Department
    D414 Equad, Olden Street
    Princeton, NJ 08544

    tel: (609)258-1022
    fax: (609)258-1139


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