I have the NiChrome as the seed layer for Au. it is O.K
Not know about if resist to HF.


Ron.Hanestad@fsi-intl.com wrote:
Hello,

I'm doing some MEMS work that involves gold as a metalization layer.  I was
wondering if you have any information on gold seed layers that are
resistant to HF.  Specifically, are you aware of any publications of Cr as
a seed layer for gold?

Any information you can provide would be greatly appreciated,

Ron Hanestad
Senior Process Development Engineer
FSI International
Chaska, MN







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