NiChrome etches very rapidly in HF, much faster than Cr, and Nickel barely
etches at all....

> -----Original Message-----
> From: Jun Li [mailto:lijiayi@usa.net]
> Sent: Tuesday, February 27, 2001 2:05 PM
> To: MEMS@ISI.EDU
> Subject: Re: [Seed Layers for Gold]
>
>
> I have the NiChrome as the seed layer for Au. it is O.K
> Not know about if resist to HF.
>
>
> Ron.Hanestad@fsi-intl.com wrote:
> Hello,
>
> I'm doing some MEMS work that involves gold as a metalization
> layer.  I was
> wondering if you have any information on gold seed layers that are
> resistant to HF.  Specifically, are you aware of any publications of Cr as
> a seed layer for gold?
>
> Any information you can provide would be greatly appreciated,
>
> Ron Hanestad
> Senior Process Development Engineer
> FSI International
> Chaska, MN
>
>
>
>
>
>
>
> ____________________________________________________________________
> Get free email and a permanent address at http://www.netaddress.com/?N=1


_________________________________________________________
Do You Yahoo!?
Get your free @yahoo.com address at http://mail.yahoo.com