I am searching for a company that can provide chlorine based RIE of aluminum
films deposited on LiTaO3.  Most companies that I have talked with are
concerned with lithium contamination of their equipment.  (They etch
primarily silicon based devices)

I have searched the MEMS website as well as the major web search engines.
If you know of such a company that can do this type of work, I would
appreciate any information.

Cheers,

Chris

Chris Jones                     214-999-0003 x 250
Materials Scientist             214-999-0007 (Fax)
Clarisay, Inc.
2626 Howell St. Suite 840
Dallas, TX 75204
[email protected]        www.clarisay.com