Hi,

Does anyone know of an etchant that will attack my oxide sacrificial layer but
not the nitride or aluminum. I have tried straight HF and it seems to work
quite alright but I am looking for a better solution. It has to be a wet
etchant. Thanks in advance.

Regards
Yan
________________________________________________________________________
Yan Loke
Institute of Microelectronics         e-mail : [email protected]
Block 85 Science Park Drive           Phone : 870-9433
The Cavendish #01-02                  Fax : 779-3711
Singapore 0511