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MEMSnet Home: MEMS-Talk: ZnS - wet etching
ZnS - wet etching
2001-03-07
Lars Zimmermann
ZnS - wet etching
Lars Zimmermann
2001-03-07
I'd like to ask if someone could tell me the wet chemistry to etch ZnS
(zinc sulphide). It seems ZnS is etched mostly dry because it usually is
stacked in multilayer structures. However, in the old days people would
etch/polish it wet. If someone know the wet etchants, please let me
know.

Thanks in advance,

: Lars

--
Lars Zimmermann

IMEC vzw (MCP-DET)
Detector Systems Group
Kapeldreef 75
B-3001 Leuven, BELGIUM

T:++32-16-288 212
F:++32-16-281 501

e-mail: [email protected]


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